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ASHRAE

SL-90-05-3 — HVAC Systems for Semiconductor Clean rooms—Part 1: System Components

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Examines the major energy-using components involved in a class 10 clean room design. Includes suggestions for lower operating costs with proper selection of HVAC components.

KEYWORDS: Clean rooms, heating, selecting, ventilation, air conditioning, designing, energy conservation.

Citation: Symposium, ASHRAE Transactions, vol. 96, pt. 2, St. Louis 1990

Product Details

Published:
1990
Number of Pages:
6
File Size:
1 file , 1000 KB
Product Code(s):
D-18701

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